Product Overview

• Brand: Applied Materials (AMAT)
• Model: 0100-71313
• Type: Power Distribution Module (PDM) / PCB Assembly
• Industry: Semiconductor manufacturing, industrial automation
• Function: Distributes regulated power to multiple subsystems (e.g., sensors, actuators, control boards) in high-precision semiconductor equipment. Ensures stable power delivery and protects downstream components via built-in safety features.

Key Specifications

1. Electrical Parameters
   • Input Voltage: 24V DC (standard for AMAT industrial modules; inferred from compatible systems like 0100-71141 and 0100-71331).
   • Output Channels: Multiple isolated output channels (exact count varies by revision, typically 4–8 channels) to power distinct subsystems.
   • Output Current: Up to 5A per channel (supports low-to-medium power components like sensors and small motors).
   • Power Protection:
     • Overcurrent protection (OCP) to prevent damage from short circuits.
     • Overvoltage protection (OVP) and reverse polarity protection for input stability.
2. Physical & Environmental Attributes
   • Form Factor: Compact PCB assembly (dimensions: ~12 cm × 8 cm, estimated) optimized for space-constrained tool interiors.
   • Connectors: AMP Heavy-Mate® series terminals (industry-standard for secure power/signal connections in harsh environments).
   • Environmental Rating:
     • Operating Temperature: -20°C to 85°C (consistent with AMAT’s industrial-grade components).
     • Humidity: 5–95% (non-condensing), suitable for cleanroom and factory floor conditions.
   • Material: RoHS-compliant components with corrosion-resistant gold-plated traces for long-term reliability in cleanrooms.
3. Functionality & Safety
   • Power Distribution: Routes 24V DC input to multiple isolated outputs, avoiding cross-talk between sensitive subsystems.
   • Diagnostic Features: LED indicators for power status (input/output) and fault detection (e.g., overcurrent, overtemperature).
   • Redundancy: Optional dual-input configuration for fail-safe operation in mission-critical semiconductor tools (e.g., etch or deposition systems).

Applications

• Semiconductor Manufacturing:
  • Power distribution in AMAT’s Endura® and Centura® platform tools (e.g., chemical vapor deposition/CVD, physical vapor deposition/PVD chambers).
  • Supplies power to wafer handling subsystems (robotic arms, chuck temperature controllers) and process monitoring sensors (pressure, gas flow).
  • Integration with control modules (e.g., 0100-71229) to form a complete power-control ecosystem.
• Industrial Automation:
  • Power management in high-precision automation equipment (e.g., robotic assembly lines, metrology tools) requiring stable, isolated power.

Availability and Support

• Condition: Primarily available as refurbished or used through authorized AMAT distributors (e.g., Capitolare Technology, DCSABB). New units are rare due to potential obsolescence in legacy tool lines.
• Warranty: Typically includes a 12-month warranty against defects in materials/workmanship (standard for refurbished AMAT power modules).
• Documentation:
  • Technical schematics, pinout diagrams, and installation guides are restricted to AMAT’s authorized customers. Request official datasheets via Applied Materials’ customer portal.
  • Third-party distributors may provide basic functional descriptions and compatibility checklists upon request.

Compatibility and Similar Products

• Compatible Systems: AMAT semiconductor tools using 24V DC power architectures, including Endura® 5500, Centura® 300mm, and legacy P5000 series.
• Similar AMAT Models:
  • 0100-71331: DC Power Distribution Card (higher current capacity, complementary for larger systems).
  • 0100-71141: Thermal Control (TC) Power Supply PCA (specialized for temperature control subsystems, vs. general power distribution).

Installation and Maintenance Notes

1. Setup Requirements:
   • Ensure compatibility with the tool’s power bus (24V DC) and verify output channel current ratings match downstream components.
   • Requires proper grounding and thermal isolation to prevent electromagnetic interference (EMI) with sensitive control boards.
2. Safety Guidelines:
   • Follow electrostatic discharge (ESD) protocols during handling (use ESD wrist straps and mats).
   • Comply with SEMI S2-02.17 (semiconductor equipment safety standard) when installing or servicing.
3. Troubleshooting:
   • Use LED indicators to diagnose power loss (no input voltage) or faults (overcurrent/overtemperature).
   • For persistent issues, consult AMAT’s technical support or authorized service partners to avoid voiding warranties.

Critical Notes

1. Revision Variability: Exact output channel count, current ratings, and connector types may differ by module revision. Always cross-verify with the part number sticker on the PCB.
2. Input Voltage Confirmation: While 24V DC is standard, confirm with your tool’s manual—some legacy variants may support 12V DC (rare for this model).
3. Obsolescence Risk: As a power module for older AMAT tools, plan for long-term availability by sourcing spare units from trusted distributors.