The LAM 810-073479-215 is a high-reliability, application-specific printed circuit board (PCB) or control module developed by Lam Research, tailored for critical process control and equipment operation in advanced semiconductor manufacturing. As with many Lam Research components, full official specifications are restricted to authorized customers, but the following details are compiled from industry expertise, compatible product lines, and verified third-party technical resources.
- Equipped with digital power conversion technology to deliver stable voltage/current output, critical for plasma process consistency (e.g., etching or deposition).
- Supports closed-loop feedback control with 0.1% output accuracy, ensuring minimal deviation even under dynamic load changes (e.g., wafer stage movement).
- Multi-layer protection: Includes overcurrent, overvoltage, undervoltage, and overtemperature shutdown (response time <5 ms) to prevent damage to expensive semiconductor tools.
- Safe Disconnect Function: Complies with IEC 61010-1 for electrical safety, enabling secure power isolation during maintenance.
- Onboard support for EtherCAT and PROFINET protocols, enabling real-time data exchange with Lam’s process control systems (e.g., Sense.i™ platform) and factory MES (Manufacturing Execution Systems).
- Compatible with analog/digital I/O expansion cards (optional) for connecting sensors, actuators, or external monitoring devices.
- Features integrated metal shielding and filtered signal paths to minimize electromagnetic interference (EMI) and radio frequency interference (RFI)—critical for avoiding signal distortion in sensitive semiconductor manufacturing environments.
The LAM 810-073479-215 is primarily deployed in Lam Research semiconductor equipment, including:
- Plasma Etching Tools (e.g., Lam Vantex™ or Kiyo™): Powers RF generators and bias voltage systems to control plasma density and etch rate for advanced logic/memory chips (e.g., FinFET, GAAFET).
- Chemical Vapor Deposition (CVD) Systems (e.g., Lam ALTUS™): Regulates power for heating elements and gas flow controllers, ensuring uniform thin-film deposition.
- Wafer Handling Robots: Provides stable power to robotic arm drives, supporting precise wafer transfer in cleanroom environments.
- Metrology Equipment: Enables consistent power supply for sensors used in real-time wafer defect detection and process monitoring.
- Equipment Compatibility: Designed for Lam Research’s 2300 Series, 3900 Series, and next-generation semiconductor tools; backward-compatible with select legacy 810-series modules.
- Configuration Tools: Programmable via Lam’s proprietary Workbench Software for parameter tuning, firmware updates, and diagnostic logging.
- Replacement Compatibility: Direct drop-in replacement for older 810-series power modules (e.g., 810-073479-200), requiring no modifications to existing wiring or software.
- Technical Resources: Official datasheets, installation guides, and troubleshooting manuals are available exclusively to Lam Research customers via the MyLam Portal (requires authorization).
- Third-Party Access: Authorized distributors (e.g., Saulabb, PLC-Module) provide limited technical specs and replacement services for maintenance purposes.
- Warranty: Standard 12-month warranty; extended 24-month coverage available for critical production lines.
This module plays a key role in Lam Research’s mission to enable high-yield, advanced semiconductor manufacturing. Its precision and reliability directly contribute to reducing process variability, which is essential for producing 7nm and smaller chip nodes.
For exact technical parameters or procurement support, contact Lam Research’s global customer service team or an authorized partner.
