The LAM 810-072906-006 is a specialized printed circuit board (PCB) or control module designed for critical applications in semiconductor manufacturing equipment, particularly in plasma etching, chemical vapor deposition (CVD), and advanced process control systems. Below is a detailed breakdown based on available technical insights and industry context, as official documentation for this specific part number is not publicly accessible.
- Model: 810-072906-006
- Manufacturer: Lam Research (a leading provider of wafer fabrication equipment)
- Product Type: High-reliability PCB or control module
- Application: Semiconductor manufacturing tools (e.g., etching, deposition, metrology systems)
- Form Factor: Compact, modular design optimized for space-constrained environments
Key Inferred Features (based on similar Lam Research components):
- Input Voltage: Likely supports 208–480 VAC (3-phase) or 24 VDC for auxiliary systems.
- Current Handling: Up to 8–10 A continuous (derating required at higher temperatures).
- Environmental Ratings:
- Operating Temperature: 0–45°C (with derating above 40°C).
- Humidity: 5–85% RH (non-condensing).
- Protection Class: IP20 (requires installation in a control cabinet).
The 810-072906-006 is part of Lam Research’s 810-series of control modules, which are integral to managing complex processes in semiconductor fabrication. Key functions include:
Process Control:
- Real-time monitoring and regulation of plasma parameters (e.g., power, gas flow, temperature).
- Integration with Lam’s Sense.i™ platform for advanced analytics and predictive maintenanceLam Research.
Communication:
- Supports industrial protocols like EtherCAT, PROFINET, or SERCOS III for seamless integration with factory automation systems.
- High-speed data interfaces for synchronization with other modules (e.g., RF generators, mass flow controllers).
Safety & Reliability:
- Safe Torque Off (STO) compliance (per IEC 61508).
- Built-in protections for overvoltage, undervoltage, and overtemperature.
- Ruggedized design for harsh environments (e.g., corrosive gases, vibrations).
Feedback Systems:
- Compatibility with Hiperface DSL or SFD3 (Smart Feedback Device) for precision motion control in robotic arms or wafer stages.
The 810-072906-006 is typically deployed in:
- Plasma Etching Tools (e.g., Lam’s Vantex™ or Kiyo™ platforms) for patterning 3D structures in advanced logic and memory devices.
- Chemical Vapor Deposition (CVD) systems (e.g., ALTUS™) for depositing thin films with atomic-layer precision.
- Metrology and Inspection Equipment for real-time process monitoring and defect detection.
- Factory Automation (e.g., wafer handling robots) in cleanroom environments.
- Equipment Models: Likely compatible with Lam Research’s 2300 Series, 3900 Series, or other legacy systems.
- Expansion Options: Supports modular I/O cards for additional analog/digital channels or safety features (e.g., STO, SLS).
- Software Tools: Configurable via Lam’s proprietary Workbench or MyLam portal for parameter tuning and diagnosticsLam Research.
Technical Resources:
- Official datasheets and user manuals are restricted to Lam Research customers and partners. Access requires registration via the MyLam portalLam Research.
- Third-party distributors (e.g., Saulabb, PLC-Module) may provide limited specifications for maintenance purposes.
Warranty & Service:
- Standard 12-month warranty; extended coverage available for mission-critical applications.
- Global technical support from Lam’s certified engineers for installation, calibration, and troubleshooting.
- Safety Standards: CE, UL, and TÜV certifications for global use.
- Environmental Compliance: RoHS and REACH compliant for hazardous substance restrictions.
The LAM 810-072906-006 is a high-performance PCB or control module optimized for precision control in semiconductor manufacturing. While exact technical details are proprietary, its design aligns with Lam Research’s legacy of delivering robust, cutting-edge solutions for 3D device fabrication. For detailed specifications or purchasing inquiries, contact Lam Research directly or an authorized distributor.
