The ZYGO ZMI - 4004 is a high - precision 4 - axis measurement board of the ZMI series, which adopts interferometric measurement technology to provide nanometer - level measurement accuracy阿美特克ZYGO.
The ZMI - 4004 is a 6U VME64x measurement board, featuring a 4 - axis design that provides four independent measurement channels. It can simultaneously measure the displacement on four axes, which is very suitable for applications requiring multi - dimensional and high - precision measurement阿美特克ZYGO.
The ZMI - 4004 is widely used in semiconductor manufacturing, especially in lithography tools, enabling next - generation lithography tools to achieve significantly improved overlay accuracy and higher throughputs. It is also applicable to other high - precision measurement scenarios such as optical component manufacturing, precision machinery processing, and scientific research, where multi - axis, high - speed, and high - precision displacement measurement is required.
