The ZYGO ZMI - 2002 is a high - precision dual - axis measuring board, specifically designed for precise measurement tasks, which adopts interferometric measurement technology to achieve nanometer - level measurement accuracy.
The ZMI - 2002 features a dual - axis design, providing two independent measurement channels that can simultaneously measure the displacement on two orthogonal axes, which is very suitable for applications requiring multi - dimensional measurement precision.
- Light Source: 633 nm laser.
- Sensor: CMOS array.
- Resolution: Less than 1 nanometer (<1 nm).
- Measurement Range: X - axis: 50 millimeters (mm); Y - axis: 25 millimeters (mm).
- Accuracy: ±0.1 micrometers (μm).
- Time Resolution: 25 nanoseconds.
- Power Requirements: 5V±5%+VCC.
- Interface Type: VME.
- Addressing Mode: A16 or A24.
- Data Transmission: D16 or D32.
- Working Temperature Range: 0°C to +40°C.
- Protection Level: IP54.
- Dimensions: 229 x 114 x 29 millimeters (mm).
- Weight: 1.2 kilograms (kg).
The ZYGO ZMI - 2002 is widely used in semiconductor manufacturing (for measuring wafer flatness, surface roughness, etc.), optical component manufacturing (for measuring the topography and contour of optical elements), precision machinery manufacturing (for measuring the surface contour and roughness of precision mechanical parts), scientific research (for precise measurement of material surface topography and roughness), and industrial automation (for the control and monitoring of automated production lines).
